Опубликована: 2025-04-16
Раздел
ПРИБОРОСТРОЕНИЕ
Аннотация
Аннотация. Данная статья посвящена изучению влияния напряжения смещения подложки в процессе реактивного магнетронного распыления на супергидрофильные свойства плёнок TiO2. Описано технологическое оборудование для формирования супергидрофильных плёнок TiO2, а также сформирована серия плёнок при различных значениях напряжения на подложке. Приведены результаты исследования супергидрофильных свойств полученных плёнок. Разработаны технологические рекомендации по оптимальной величине напряжения смещения при формировании супергидрофильных плёнок TiO2 методом реактивного магнетронного распыления.
КЛЮЧЕВЫЕ СЛОВА:
оксид титана; тонкие плёнки; магнетронное распыление; супергидрофильные свойства
Литература
1. Zhou X., Yu S. Colorful nanostructured TiO2 film with superhydrophobic–superhydrophilic switch-able wettability and anti-fouling property // Journal of Alloys and Compounds. 2019. Vol. 798. Pp. 257–266.
2. Léonard G.L., Remy S. Doping TiO2 films with carbon nanotubes to simultaneously optimise anti-static, photocatalytic and superhydrophilic properties // Journal of Sol-Gel Science and Technology. 2016. Vol. 79. Pp. 413–425.
3. Jesus M.A.M.L., Neto J.T.S. Superhydro-philic self-cleaning surfaces based on TiO2 and TiO2/SiO2 composite films for photovoltaic module cover glass //Applied Adhesion Science. 2015. Vol. 3. Pp. 244–249.
4. Shashin D.E., Sushentsov N.I. Mathematical model development for thin zinc oxide film formation with assigned dielectric constant values // IOP Conf. Series: Journal of Physics: Conf. Series. 2019. Pp. 1–4.
5. Shashin D.E., Sushentsov N.I. Obtaining thin metal films and their compounds using magnetron sputtering and arc evaporation in a single technological cycle // IOP Conf. Series: Journal of Physics: Conf. Series. 2021. Pp. 1–4.
6. Shashin D.E., Sushentsov N.I. Development of manufacturing technology of photo-dielectric sensi-tive element of ultraviolet range on the basis of thin films of zinc oxide // Herald of the Bauman Moscow State Technical University. Series Instrument Engi-neering. 2019. No 6(129). Pp. 99–109.
7. Talinungsang N.P., Purkayastha D.D. SnO2/TiO2 bilayer thin films exhibiting superhydro-philic properties // AIP Conference Proceedings. 2017. Vol. 1832. Pp. 35–80.
8. Vahl A., Veziroglu S. B. Pathways to Tailor Photocatalytic Performance of TiO2 Thin Films De-posited by Reactive Magnetron Sputtering // Materi-als. 2019. Vol.12. P. 2–18.
9. Masakazu A. Preparation, Characterization, and Reactivities of Highly Functional Titanium Ox-ide-Based Photocatalysts Able to Operate under UV–Visible Light Irradiation: Approaches in Realizing High Efficiency in the Use of Visible Light // Bull. Chem. Soc. Jpn. 2004. Vol. 77. Pp. 1427–1442.
10. Wong M.S. Reactively sputtered N-doped ti-tanium oxide films as visible-light photocatalystv // Thin Solid Films. 2006. Vol. 494. Pp. 244–249.
2. Léonard G.L., Remy S. Doping TiO2 films with carbon nanotubes to simultaneously optimise anti-static, photocatalytic and superhydrophilic properties // Journal of Sol-Gel Science and Technology. 2016. Vol. 79. Pp. 413–425.
3. Jesus M.A.M.L., Neto J.T.S. Superhydro-philic self-cleaning surfaces based on TiO2 and TiO2/SiO2 composite films for photovoltaic module cover glass //Applied Adhesion Science. 2015. Vol. 3. Pp. 244–249.
4. Shashin D.E., Sushentsov N.I. Mathematical model development for thin zinc oxide film formation with assigned dielectric constant values // IOP Conf. Series: Journal of Physics: Conf. Series. 2019. Pp. 1–4.
5. Shashin D.E., Sushentsov N.I. Obtaining thin metal films and their compounds using magnetron sputtering and arc evaporation in a single technological cycle // IOP Conf. Series: Journal of Physics: Conf. Series. 2021. Pp. 1–4.
6. Shashin D.E., Sushentsov N.I. Development of manufacturing technology of photo-dielectric sensi-tive element of ultraviolet range on the basis of thin films of zinc oxide // Herald of the Bauman Moscow State Technical University. Series Instrument Engi-neering. 2019. No 6(129). Pp. 99–109.
7. Talinungsang N.P., Purkayastha D.D. SnO2/TiO2 bilayer thin films exhibiting superhydro-philic properties // AIP Conference Proceedings. 2017. Vol. 1832. Pp. 35–80.
8. Vahl A., Veziroglu S. B. Pathways to Tailor Photocatalytic Performance of TiO2 Thin Films De-posited by Reactive Magnetron Sputtering // Materi-als. 2019. Vol.12. P. 2–18.
9. Masakazu A. Preparation, Characterization, and Reactivities of Highly Functional Titanium Ox-ide-Based Photocatalysts Able to Operate under UV–Visible Light Irradiation: Approaches in Realizing High Efficiency in the Use of Visible Light // Bull. Chem. Soc. Jpn. 2004. Vol. 77. Pp. 1427–1442.
10. Wong M.S. Reactively sputtered N-doped ti-tanium oxide films as visible-light photocatalystv // Thin Solid Films. 2006. Vol. 494. Pp. 244–249.
